Taxanaha TPM5 kontoroolka awooda wuxuu qaataa fikradda naqshadaynta moduleka wuxuuna isku daraa ilaa 6 wareegyo gudaha ah.Alaabooyinka waxaa inta badan lagu isticmaalaa foornooyinka fidinta, PECVD, foornooyinka epitaxy, iwm.